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半导体制造业中真空泵的发展趋势
真空泵作为半导体制造行业的一种主要的生产设备，愈来愈要求安全可靠。英国萨西克斯郡Edwards公司则推出了“福姆勃林”(Fomblin)惰性润滑流体，它不管用在什么场合，同氧接触都是没有问题的。
常用真空系统的组成与安装
从日常生活用电灯泡的制造，到宇航模拟舱的实验，所有真空工程中的应用设备。都是通过真空系统实现的。不同的真空应用设备，所用的真空系统是不完全一样的，但其基本组成是类似的。
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